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HOLLOW OPTICAL WAVEGUIDE, PRESSURE SENSOR, AND PRODUCTION METHOD OF HOLLOW OPTICAL WAVEGUIDE

机译:空心光学波导,压力传感器和空心光学波导的生产方法

摘要

To enable measurement of strain of an object to be measured to be extensively performed and to reduce the effect of environmental temperature variation.SOLUTION: A pressure sensor comprises: a light generation section 11 which generates light; a hollow optical waveguide 12 which the light enters and which is composed of a material deformable by external pressure, is deformed by pressure due to strain of an object to be measured 14a externally contacting therewith, and changes an intensity of the light passing through a hollow core part 121 depending on an intensity of the pressure; and a light intensity measurement section 13 which measures the intensity of the light passing through the hollow optical waveguide 12 and utilizes the intensity of the light to calculate the pressure due to the strain of the object to be measured 14a. For example, the hollow optical waveguide 12 is composed of the core part 121 including air and a clad part 122 made of a flexible silicon-based material.SELECTED DRAWING: Figure 1
机译:为了能够广泛地执行要测量的对象的应变的测量并且减小环境温度变化的影响。解决方案:压力传感器包括:发光部11,其产生光;以及入射光的中空光波导12由可通过外部压力变形的材料构成,由于与外部接触的被测定物14a的应变而因压力而变形,从而改变通过中空的光的强度。核心部分121取决于压力强度;光强度测量部分13测量通过中空光波导12的光的强度,并利用该光的强度来计算由于被测物14a的应变引起的压力。例如,中空光波导12由包括空气的芯部分121和由柔性硅基材料制成的包层部分122组成。

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