PROBLEM TO BE SOLVED: To provide an actuator sensor module, which is a module device formed by combining a fluid actuator device and a sensor.;SOLUTION: The present invention includes: a substrate 11; at least one sensor 12; and at least one actuator 13, the sensor being formed on the substrate, and the actuator being attached to the substrate. The present invention further includes at least one passage 14 between the present invention and the substrate in a position near a side of the sensor. The actuator compresses a fluid and discharges the fluid to the passage when is driven, and the fluid is measured by the sensor by passing through the sensor.;SELECTED DRAWING: Figure 1B;COPYRIGHT: (C)2019,JPO&INPIT
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