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IMAGING INSPECTION DEVICE, IMAGING INSPECTION METHOD, IMAGING INSPECTION PROGRAM, AND COMPUTER READABLE RECORDING MEDIUM AS WELL AS INSTRUMENT
IMAGING INSPECTION DEVICE, IMAGING INSPECTION METHOD, IMAGING INSPECTION PROGRAM, AND COMPUTER READABLE RECORDING MEDIUM AS WELL AS INSTRUMENT
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机译：影像检查设备，影像检查方法，影像检查程序，计算机可读记录介质以及仪器
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摘要
To make it possible to more easily and more robustly inspect damage or printing, using a photometric stereo method.SOLUTION: An imaging inspection device comprises: imaging means that is to image a plurality of partially illuminated images different in an illumination direction by imaging a work W from a fixed direction at an illumination timing for lighting each illumination block by illumination control means; normal line vector calculation means 41a that uses a pixel value for each pixel in a corresponding relationship between the plurality of partially illuminated images to calculate a normal line vector n of each pixel, which varies in accordance a change in relative relationship between the imaging means in an optical axis direction of the imaging means and the illumination block therein, with respect to a surface of the work W; contour image generation means 41b that applies differential processing to the calculated normal line vector n of each pixel in an X direction and Y direction, and generates a contour image indicative of a contour of a tilt of the surface of the work W; display means that is capable of displaying the contour image; inspection area setting means that is capable of setting an inspection area on a contour extracted image; and inspection means that is to conduct inspection in the inspection area.SELECTED DRAWING: Figure 1
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