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Laser and method of generating deep UV laser radiation
Laser and method of generating deep UV laser radiation
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机译:激光和产生深紫外激光辐射的方法
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摘要
A DUV laser includes an optical bandwidth filtering device, such as etalon, which is disposed outside of the laser oscillator cavity of the fundamental laser, and which directs one range of wavelengths into one portion of a frequency conversion chain and another range of wavelengths into another portion of the frequency conversion train, thereby reducing the bandwidth of the DUV laser output while maintaining high conversion efficiency in the frequency conversion chain.
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