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Laser and method of generating deep UV laser radiation

机译:激光和产生深紫外激光辐射的方法

摘要

A DUV laser includes an optical bandwidth filtering device, such as etalon, which is disposed outside of the laser oscillator cavity of the fundamental laser, and which directs one range of wavelengths into one portion of a frequency conversion chain and another range of wavelengths into another portion of the frequency conversion train, thereby reducing the bandwidth of the DUV laser output while maintaining high conversion efficiency in the frequency conversion chain.
机译:DUV激光器包括诸如标准具的光学带宽过滤装置,其被布置在基本激光器的激光振荡器腔的外部,并且将一个波长范围引导到频率转换链的一部分中,并且将另一波长范围引导到频率转换链的一部分中。频率转换序列的一部分,从而减少了DUV激光输出的带宽,同时在频率转换链中保持了高转换效率。

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