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TEST CONDITION DETERMINATION APPARATUS AND TEST CONDITION DETERMINATION METHOD
TEST CONDITION DETERMINATION APPARATUS AND TEST CONDITION DETERMINATION METHOD
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机译：试验条件测定装置及试验条件测定方法
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摘要
To provide a technology that can determine appropriate test conditions.SOLUTION: A test condition determination device 1 includes a map creation unit 11, a breakdown voltage estimation unit 12, and a test condition determination unit 13. The map creation unit 11 creates a wafer map 25 for a chip 22 on the basis of the measurement value of the thickness of an epitaxial growth layer, the measurement value of the carrier concentration of the epitaxial growth layer, and the measurement result of crystal defects of the epitaxial growth layer and a substrate. The breakdown voltage estimation unit 12 estimates the breakdown voltage of the chip 22 on the basis of the wafer map 25. The test condition determination unit 13 determines a test condition to be performed on the chip 22 based on the estimation result of the breakdown voltage estimation unit 12.SELECTED DRAWING: Figure 1
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