首页> 外国专利> PIEZOELECTRIC ACTUATOR, ADDITIONAL FORCE DETECTION METHOD OF PIEZOELECTRIC ACTUATOR, RESONANCE STATE DETECTION METHOD OF PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC DRIVE DEVICE, HAND, ROBOT, ELECTRONIC COMPONENT TRANSFER DEVICE, PRINTER AND PROJECTOR

PIEZOELECTRIC ACTUATOR, ADDITIONAL FORCE DETECTION METHOD OF PIEZOELECTRIC ACTUATOR, RESONANCE STATE DETECTION METHOD OF PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC DRIVE DEVICE, HAND, ROBOT, ELECTRONIC COMPONENT TRANSFER DEVICE, PRINTER AND PROJECTOR

机译：压电致动器，压电致动器的附加力检测方法，压电致动器的共振状态检测方法，压电驱动装置，手，机器人，电子部件传送装置，打印机和投影仪

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摘要

To provide a piezoelectric actuator capable of detecting additional force or an additional force detection method thereof, a resonance state detection method of piezoelectric actuator for detecting resonance state of the piezoelectric actuator in drive state, and a piezoelectric drive device including the piezoelectric actuator, a hand, a robot, an electronic component transfer device, a printer and a projector.SOLUTION: A piezoelectric actuator has a vibration part including a piezoelectric material for driving and a piezoelectric element for driving including an electrode for driving, a fixing part for fixing the vibration part, and a connection for connecting the vibration part and the fixing part, and including a first piezoelectric element including a first piezoelectric material for detection and a first electrode for detection and a second piezoelectric element for detection including a second piezoelectric material for detection and a second electrode for detection.SELECTED DRAWING: Figure 2

机译：为了提供一种能够检测附加力的压电致动器或其附加力检测方法，用于检测驱动状态下的压电致动器的共振状态的压电致动器的共振状态检测方法，以及具有该压电致动器的压电驱动装置，手解决方案：压电致动器具有振动部分和振动部分，该振动部分包括用于驱动的压电材料，该振动部分包括用于驱动的电极，该振动部分包括用于驱动的电极，该固定部分用于固定振动。部件，以及用于连接振动部件和固定部件的连接件，并且包括第一压电元件和第二检测压电元件，该第一压电元件包括用于检测的第一压电材料和用于检测的第一电极，第二压电元件包括用于检测的第二压电材料和用于检测振动的电极。用于检测的第二电极。选择的DRA机翼：图2

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公开/公告号JP2019160975A

专利类型
公开/公告日2019-09-19

原文格式PDF
申请/专利权人 SEIKO EPSON CORP;
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申请/专利号JP20180044616
发明设计人 ARAKAWA YUTAKA;TAKAHASHI TOMOAKI;
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申请日2018-03-12
分类号H01L41/08;H01L41/113;H01L41/09;H01L41/047;H01L41/187;H01L41/193;
国家 JP
入库时间 2022-08-21 12:25:00

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