首页> 外国专利> INTERATOMIC FORCE MICROSCOPE AND METHOD FOR SETTING POSITION OF INTERATOMIC FORCE MICROSCOPE

INTERATOMIC FORCE MICROSCOPE AND METHOD FOR SETTING POSITION OF INTERATOMIC FORCE MICROSCOPE

机译:原子间力显微镜和设定原子间力显微镜位置的方法

摘要

To provide an interatomic force microscope that can automatically set an alignment before the start of measurement, and a method for setting the position of an interatomic force microscope.SOLUTION: The interatomic force microscope includes: a vertical-direction camera 32 with its imaging direction set in a first direction, the camera 32 being for imaging a cantilever 13, a sample board 11, and a laser beam; and a side camera 31 with its imaging direction set in a second direction different from the first direction, the side camera being for imaging the cantilever 13, the sample board 11, and a laser beam. On the basis of images taken by the vertical-direction camera 32 and the side camera 31, the positions of the cantilever 13 and the sample board 11 are automatically set.SELECTED DRAWING: Figure 1
机译:提供一种能够在测量开始之前自动设置对准的原子间力显微镜以及一种设置原子间力显微镜位置的方法。解决方案:原子间力显微镜包括:设置了成像方向的垂直相机32在第一方向上,照相机32用于对悬臂13,样品板11和激光束成像。侧面照相机31,其摄像方向设定为与第一方向不同的第二方向,该侧面照相机用于对悬臂13,样品板11以及激光进行摄像。根据垂直方向照相机32和侧面照相机31拍摄的图像,自动设置悬臂13和样品板11的位置。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号