首页>
外国专利>
INTERATOMIC FORCE MICROSCOPE AND METHOD FOR SETTING POSITION OF INTERATOMIC FORCE MICROSCOPE
INTERATOMIC FORCE MICROSCOPE AND METHOD FOR SETTING POSITION OF INTERATOMIC FORCE MICROSCOPE
展开▼
机译:原子间力显微镜和设定原子间力显微镜位置的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
To provide an interatomic force microscope that can automatically set an alignment before the start of measurement, and a method for setting the position of an interatomic force microscope.SOLUTION: The interatomic force microscope includes: a vertical-direction camera 32 with its imaging direction set in a first direction, the camera 32 being for imaging a cantilever 13, a sample board 11, and a laser beam; and a side camera 31 with its imaging direction set in a second direction different from the first direction, the side camera being for imaging the cantilever 13, the sample board 11, and a laser beam. On the basis of images taken by the vertical-direction camera 32 and the side camera 31, the positions of the cantilever 13 and the sample board 11 are automatically set.SELECTED DRAWING: Figure 1
展开▼