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MOLECULAR BEAM EPITAXY SYSTEM AND METHOD FOR REDUCING EXCESS FLUX IN A MOLECULAR BEAM EPITAXY SYSTEM
MOLECULAR BEAM EPITAXY SYSTEM AND METHOD FOR REDUCING EXCESS FLUX IN A MOLECULAR BEAM EPITAXY SYSTEM
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机译:分子束外延系统和减少分子束外延系统中过剩通量的方法
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摘要
The present invention provides a molecular beam epitaxy system that comprises a growth chamber (101), a substrate manipulator (107) mounted inside the growth chamber (101) for holding a substrate (108) to be epitaxially grown, a source (109, 110) for supplying a flux of a growth material towards the substrate (108), a reflector (113) arranged between the source (109) and the substrate manipulator (107) for reflecting part of the flux supplied by the source (109), and means (115, 201, 202, 203) for collecting at least part of the flux reflected from the reflector (113). The present invention also provides a method for reducing excess flux in a molecular beam epitaxy system.
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