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METHOD FOR CO-DEPOSITING DETONATION NANODIAMONDS AND DIAMOND-LIKE CARBON ONTO A SUBSTRATE AND COMPOSITE FILMS COMPRISING DETONATION NANODIAMONDS AND DIAMOND-LIKE CARBON
METHOD FOR CO-DEPOSITING DETONATION NANODIAMONDS AND DIAMOND-LIKE CARBON ONTO A SUBSTRATE AND COMPOSITE FILMS COMPRISING DETONATION NANODIAMONDS AND DIAMOND-LIKE CARBON
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机译：将爆轰纳米金刚石和类金刚石碳共沉积到包含爆轰纳米金刚石和类金刚石碳的基质和复合膜上的方法
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摘要
The present application provides a method for co-depositing nanodiamonds and diamond-like carbon onto a substrate with physical vapor deposition (PVD) method, the method comprising providing a substrate, providing a source of ionized carbon plasma, providing a source of nanodiamonds, ejecting the nanodiamonds and the ionized carbon plasma towards the substrate to co-deposit the nanodiamonds and diamond-like carbon onto the substrate. The present application also provides a composite film comprising nanodiamonds and diamond-like carbon.
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