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KELVIN TEST PROBE, KELVIN TEST PROBE MODULE, AND MANUFACTURING METHOD THEREFOR
KELVIN TEST PROBE, KELVIN TEST PROBE MODULE, AND MANUFACTURING METHOD THEREFOR
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机译：开尔文测试探针，开尔文测试探针模块及其制造方法
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摘要
The invention relates to a probe for Kelvin Test, a probe module for Kelvin Test and a manufacturing method thereof. The probe for Kelvin Test comprises: an upper insulation sheet made of flexible material; a lower insulation sheet which is spaced apart from the upper insulation sheet in the vertical direction and which is made of flexible material; an insulation elastic member which connects the upper insulation sheet and the lower insulation sheet and which is made of elastic material; a first upper conductive pad which is formed on one surface of the upper insulation sheet; a second upper conductive pad which is formed on the other surface of the upper insulation sheet; a first upper conductive pin which is attached to the first upper conductive pad such that one portion of the first upper conductive pin protrudes above the upper insulation sheet; a second upper conductive pin which is attached to the second upper conductive pad such that one portion of the second upper conductive pin protrudes above the upper insulation sheet; a first lower conductive pad which is formed on one surface of the lower insulation sheet; a second lower conductive pad which is formed on the other surface of the lower insulation sheet; a first lower conductive pin which is attached to the first lower conductive pad such that one portion of the first lower conductive pin protrudes below the lower insulation sheet; a second lower conductive pin which is attached to the second lower conductive pad such that one portion of the second lower conductive pin protrudes below the lower insulation sheet; a first conductive wire which electrically connects the first upper conductive pad and the first lower conductive pad such that the first upper conductive pin, the first upper conductive pad, the first lower conductive pad and the first lower conductive pin form a first conductive line in the vertical direction; and a second conductive wire which electrically connects the second upper conductive pad and the second lower conductive pad such that the second upper conductive pin, the second upper conductive pad, the second lower conductive pad and the second lower conductive pin form a second conductive line in the vertical direction.
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