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Method and apparatus based on detecting the polarization property of a polarization maintaining fiber probe for measuring structures of a micro part
Method and apparatus based on detecting the polarization property of a polarization maintaining fiber probe for measuring structures of a micro part
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机译:基于检测用于测量微零件结构的保偏光纤探针的偏振特性的方法和设备
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摘要
A method and equipment based on detecting the polarization property of a polarization maintaining fiber (PMF) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into polarization property changes of the PMF probe, and how to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the PMF probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.
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