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Method and apparatus based on detecting the polarization property of a polarization maintaining fiber probe for measuring structures of a micro part

机译:基于检测用于测量微零件结构的保偏光纤探针的偏振特性的方法和设备

摘要

A method and equipment based on detecting the polarization property of a polarization maintaining fiber (PMF) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into polarization property changes of the PMF probe, and how to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the PMF probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.
机译:提供了一种基于检测保偏光纤(PMF)探头的偏振特性以测量微小部件的结构的方法和设备。所提供的方法涉及如何通过将二维或三维接触位移转换为PMF探针的偏振特性变化来完成对微型零件结构的测量,以及如何重建微型零件的结构几何形状。所提供的设备可用于使PMF探针的球形尖端与微型零件接触,确定接触点的坐标并重建微型零件的结构几何形状。所提供的方法和设备具有灵敏度高,探测力低,检查长宽比高,抗环境干扰的特点。

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