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METHOD FOR DEPOSITION OF DIAMOND FILMS FROM THE THERMALLY ACTIVATED MIXTURE OF GASES AND THE REACTOR FOR ITS IMPLEMENTATION
METHOD FOR DEPOSITION OF DIAMOND FILMS FROM THE THERMALLY ACTIVATED MIXTURE OF GASES AND THE REACTOR FOR ITS IMPLEMENTATION
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机译：从热活化气体混合物中沉积金刚石薄膜的方法及其实施器
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摘要
FIELD: chemistry.SUBSTANCE: invention relates to the production of artificial diamonds by the method of chemical gas-phase deposition, in particular, is associated with the activation of the flow of a mixture of neutral gases with heated metallic surfaces and can be used in electronics, instrument-making, in factories producing diamond tools. Method for depositing diamond films from a thermally activated gas mixture comprises activating a gas mixture, containing hydrogen and methane, by means of a metal activator, and depositing the film on the heated substrate. Activation of said gas mixture is carried out in a metal activator, consisting of a copper water-cooled shell polished from within and tubes installed to form two coaxial cylindrical channels. Inner cylindrical channel is formed by the walls of a metal tube and a quartz tube, the outer cylindrical channel is formed by the walls of an ohmically heated tube made of a refractory metal, and a molybdenum tube installed with a ceramic insulator in said housing. Space between the tubes forming the outer cylindrical channel and the body of the metal activator are fed with argon, in the space between the tubes forming the inner and outer cylindrical channels, hydrogen is supplied, and a mixture of hydrogen and methane is fed through the tubes forming the inner cylindrical channel. Activation of said mixture is carried out by heating the wall of an outer cylindrical channel formed by said ohmically heated tube. Reactor for depositing diamond films from a thermally activated gas mixture comprises a vacuum chamber and a metal activator and a substrate holder disposed therein. Metal activator consists of a copper water cooled body, the inner surface of which is polished, and tubes installed to form two coaxial cylindrical channels. Inner cylindrical channel is formed by the walls of a metal tube and a quartz tube, the outer cylindrical channel is formed by the walls of an ohmically heated tube made of a refractory metal, and a molybdenum tube installed with a ceramic insulator in the copper casing of the activator.EFFECT: it is possible to provide a method and apparatus for depositing diamond films from a thermally activated gas mixture that provides a high deposition rate, high quality of the resulting diamond films, and a maximum reduction in heat loss.2 cl, 1 dwg, 1 ex
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机译：技术领域本发明涉及通过化学气相沉积的方法生产人造金刚石，特别是涉及活化具有加热的金属表面的中性气体的混合物的流动，并且可以用于电子，仪器制造，在工厂中生产金刚石工具。从热活化的气体混合物中沉积金刚石膜的方法包括借助于金属活化剂活化包含氢和甲烷的气体混合物，并将膜沉积在加热的基材上。所述气体混合物的活化在金属活化剂中进行，该金属活化剂包括从内部抛光的铜水冷壳和安装以形成两个同轴圆柱形通道的管。内部圆柱形通道由金属管和石英管的壁形成，外部圆柱形通道由由难熔金属制成的欧姆加热管的壁以及在所述壳体中安装有陶瓷绝缘体的钼管形成。形成外部圆柱形通道的管与金属活化剂主体之间的空间充有氩气，在形成内部圆柱形通道和外部圆柱形通道的管之间的空间中充有氢气，并且氢气和甲烷的混合物通过管形成内部圆柱形通道。通过加热由所述欧姆加热管形成的外部圆柱形通道的壁来进行所述混合物的活化。用于从热活化的气体混合物沉积金刚石膜的反应器包括真空室和金属活化剂以及设置在其中的衬底支架。金属活化剂由铜水冷体（其内表面已抛光）和安装成两个同轴圆柱通道的管组成。内部圆柱形通道由金属管和石英管的壁形成，外部圆柱形通道由难熔金属制成的欧姆加热管的壁和在铜制外壳中安装有陶瓷绝缘体的钼管形成效果：有可能提供一种从热活化的气体混合物中沉积金刚石膜的方法和装置，该方法和设备可提供高沉积速率，高质量的所得金刚石膜，并最大程度地减少热损失。2cl ，1 dwg，1 ex
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