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PLATING APPARATUS SUBSTRATE HOLDER CONTROL METHOD FOR PLATING APPARATUS AND STORAGE MEDIUM STORING A PROGRAM FOR CAUSING A COMPUTER TO EXECUTE A METHOD FOR CONTROLLING A PLATING APPARATUS
PLATING APPARATUS SUBSTRATE HOLDER CONTROL METHOD FOR PLATING APPARATUS AND STORAGE MEDIUM STORING A PROGRAM FOR CAUSING A COMPUTER TO EXECUTE A METHOD FOR CONTROLLING A PLATING APPARATUS
The present invention relates to a plating apparatus to plate a substrate using a substrate holder having an elastic protrusion portion sealing a surface to be plated of the substrate, comprising: a measuring apparatus to measure at least one of an amount of push of the elastic protrusion portion and a load applied to the elastic protrusion portion when the substrate is physically in contact with the elastic protrusion portion of the substrate holder, and measuring a deformation state of the elastic protrusion portion; and a control apparatus to determine whether the sealing performed by the elastic protrusion portion is in a normal state based on the measured deformation state.
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