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SUBSTRATE ALIGNER, SUBSTRATE TESTING APPARATUS INCLUDING SAME, AND SUBSTRATE ALIGNING METHOD USING SAME
SUBSTRATE ALIGNER, SUBSTRATE TESTING APPARATUS INCLUDING SAME, AND SUBSTRATE ALIGNING METHOD USING SAME
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机译：基板报警器，包括相同功能的基板测试装置以及使用该功能的基板报警方法
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摘要
Disclosed is a substrate aligner which is formed in a substrate test apparatus and aligns a substrate. The substrate aligner includes a control unit which includes a rotary head coming in contact with the lateral side of the substrate and rotating the substrate to control the position, a driving unit for providing a rotary force to the rotary head, and a gear unit for transmitting the rotary force of the driving unit to the rotary head between the control unit and the driving unit. As mentioned above, the substrate aligner includes the gear unit as well as the driving unit for providing the rotary force, thereby more minutely controlling a rotation angle of the rotary head in comparison with a conventional aligner.;COPYRIGHT KIPO 2018
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