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LIQUID MATERIAL SUPPLY DEVICE, LIQUID MATERIAL SUPPLY METHOD, METHOD FOR PURGING LIQUID SUPPLY TUBE, AND MATERIAL GAS SUPPLY SYSTEM
LIQUID MATERIAL SUPPLY DEVICE, LIQUID MATERIAL SUPPLY METHOD, METHOD FOR PURGING LIQUID SUPPLY TUBE, AND MATERIAL GAS SUPPLY SYSTEM
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机译：液体材料供给装置，液体材料供给方法，液体供给管的注入方法，以及气体供给系统
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摘要
In order to provide a liquid material supply device with which it is possible to supply a liquid material at a lower pressure than conventionally done while allowing the liquid material to be lifted to a desired height, the present invention is provided with: a storage vessel in which the liquid material is stored; a lead-out tube by which the liquid material is led out of the storage vessel; a temporary retention unit in which a prescribed amount of the liquid material that is led out of the storage vessel is temporarily retained in the temporary retention unit, the temporary retention unit being connected to the lead-out tube; and a pressure-feed mechanism configured so as to bring a gas into contact with the liquid material that is temporarily retained in the temporary retention unit, and push and move the liquid material upward with the gas.
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