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SAMPLE FOR PARTICLE MEASUREMENT, PARTICLE MEASUREMENT METHOD, AND PARTICLE MEASUREMENT DEVICE
SAMPLE FOR PARTICLE MEASUREMENT, PARTICLE MEASUREMENT METHOD, AND PARTICLE MEASUREMENT DEVICE
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机译：颗粒物测量样品，颗粒物测量方法和颗粒物测量装置
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摘要
To provide a sample for particle measurement that makes it possible to evaluate the three-dimensional shape and fine particle type of a fine particle, a sample for particle measurement is provided with a substrate, an isolated fine particle to be measured (144-1) that is disposed on the substrate, and an isolated standard fine particle (143-1) that is disposed on the substrate in the vicinity of the isolated fine particle to be measured.
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