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METHOD FOR MANUFACTURING ILLUMINANCE ADJUSTMENT FILTER, ILLUMINANCE ADJUSTMENT FILTER, LIGHTING OPTICAL SYSTEM, AND EXPOSURE DEVICE
METHOD FOR MANUFACTURING ILLUMINANCE ADJUSTMENT FILTER, ILLUMINANCE ADJUSTMENT FILTER, LIGHTING OPTICAL SYSTEM, AND EXPOSURE DEVICE
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机译：制造照明调节滤光片，照明调节滤光片，照明光学系统和曝光设备的方法
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摘要
This method for manufacturing an illuminance adjustment filter comprises steps of: measuring illuminance I(i) at an arbitrary point i (i is an integer) on an exposure surface with no optical filter (90) placed in an optical path EL; calculating the optical transmittance distribution for each cell (91) on the basis of the measured illuminance I(i) at each point; and forming an optical filter (90) including cells (91) each having a pattern (93) corresponding to the calculated optical transmittance distribution. Thus, any variation in the illuminance distribution on the exposure surface caused by components constituting a lighting optical system is minimized.
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