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K-nearest neighbor-based method and system to provide multi-variate analysis on tool process data
K-nearest neighbor-based method and system to provide multi-variate analysis on tool process data
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机译:基于K近邻的方法和系统可对刀具过程数据进行多变量分析
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摘要
A server computer system creates a reference fingerprint for a first tool running a recipe. The server computer system uses reference data that pertains to the first tool performing within parameters to create the reference fingerprint. The reference fingerprint includes a target baseline and allowable ranges based on the target baseline. The server computer system determines whether sample data that is associated with a second tool running the recipe is performing within the parameters based on a comparison of the sample data to the reference fingerprint. The second tool can be the first tool or another tool of a same type as the first tool. The server computer system provides a classification of the second tool to at least one of a system or a user based on the comparison of the sample data to the reference fingerprint. The classification indicates whether the second tool is performing within the parameters.
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