首页> 外国专利> K-nearest neighbor-based method and system to provide multi-variate analysis on tool process data

K-nearest neighbor-based method and system to provide multi-variate analysis on tool process data

机译:基于K近邻的方法和系统可对刀具过程数据进行多变量分析

摘要

A server computer system creates a reference fingerprint for a first tool running a recipe. The server computer system uses reference data that pertains to the first tool performing within parameters to create the reference fingerprint. The reference fingerprint includes a target baseline and allowable ranges based on the target baseline. The server computer system determines whether sample data that is associated with a second tool running the recipe is performing within the parameters based on a comparison of the sample data to the reference fingerprint. The second tool can be the first tool or another tool of a same type as the first tool. The server computer system provides a classification of the second tool to at least one of a system or a user based on the comparison of the sample data to the reference fingerprint. The classification indicates whether the second tool is performing within the parameters.
机译:服务器计算机系统为运行配方的第一工具创建参考指纹。服务器计算机系统使用与在参数内执行的第一工具有关的参考数据来创建参考指纹。参考指纹包括目标基线和基于目标基线的允许范围。服务器计算机系统基于样本数据与参考指纹的比较来确定与运行配方的第二工具相关联的样本数据是否在参数内执行。第二工具可以是第一工具或与第一工具相同类型的另一工具。服务器计算机系统基于样本数据与参考指纹的比较向系统或用户中的至少一个提供第二工具的分类。分类表明第二个工具是否在参数范围内执行。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号