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Updating of a recipe for evaluating a manufacturing stage of an electrical circuit

机译:更新用于评估电路制造阶段的配方

摘要

A computerized system that may include a recipe module and a yield diagnostics module. The yield diagnostics module may be configured to generate evaluation results that are indicative of an outcome of an evaluation process of at least one manufacturing stage of at least one electrical circuit. The evaluation results differ from end of line (EOL) results. The recipe module may be configured to receive EOL results relating to the at least one electrical circuit, to receive the evaluation results relating to the at least one electrical circuit; to correlate the evaluation results and the EOL results to provide correlation results; and respond to the correlation results. The responding to the correlation results may include determining whether to alter a recipe in response to the correlation results and altering the recipe if it is determined to alter the recipe.
机译:一种计算机系统,其可以包括配方模块和产量诊断模块。成品率诊断模块可以被配置为生成评估结果,该评估结果指示至少一个电路的至少一个制造阶段的评估过程的结果。评估结果与行尾(EOL)结果不同。配方模块可以被配置为接收与至少一个电路有关的EOL结果,以接收与至少一个电路有关的评估结果;使评估结果和EOL结果相关,以提供相关结果;并回应相关结果。对相关结果的响应可以包括:响应于相关结果确定是否改变配方;以及如果确定改变配方,则改变配方。

著录项

  • 公开/公告号US9880550B2

    专利类型

  • 公开/公告日2018-01-30

    原文格式PDF

  • 申请/专利权人 APPLIED MATERIALS ISRAEL LTD.;

    申请/专利号US201514667086

  • 发明设计人 AMIR WACHS;

    申请日2015-03-24

  • 分类号G05B19/418;

  • 国家 US

  • 入库时间 2022-08-21 12:55:08

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