where M denotes the set of reference atomic masses, Pi denotes the partial pressures for the atomic masses measured by the mass spectrometer, the coefficients αi denote preset weighting coefficients associated with each partial pressure Pi, and N denotes a maximum atomic mass for which the partial pressure Pi can be measured by the mass spectrometer."/>
Method for following degassing rate by measuring partial pressures measured by mass spectrometry
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Method for following degassing rate by measuring partial pressures measured by mass spectrometry
Method for following degassing rate by measuring partial pressures measured by mass spectrometry
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机译：通过测量由质谱法测量的分压来跟踪脱气速率的方法
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摘要
A method for following the degassing of a component placed in a vacuum chamber, comprises: measuring partial pressures Pi for a set M of reference atomic masses, by means of a mass spectrometer connected to the vacuum chamber; determining a degassing rate η, at least as a function of the measured partial pressures Pi; and, calculating a slope of the variation in the degassing rate. The degassing rate η may advantageously be determined by calculation by means of a relationship of the type:; ]]> where M denotes the set of reference atomic masses, Pi denotes the partial pressures for the atomic masses measured by the mass spectrometer, the coefficients αi denote preset weighting coefficients associated with each partial pressure Pi, and N denotes a maximum atomic mass for which the partial pressure Pi can be measured by the mass spectrometer.
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机译：一种用于对置于真空室中的部件进行脱气的方法，该方法包括：通过连接到真空室的质谱仪，测量一组参考原子质量M的分压P i 。至少根据测得的分压P i 确定脱气率η;计算除气率变化的斜率。脱气率η可以有利地通过以下类型的关系通过计算来确定： 展开▼
