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SEMICONDUCTOR-FREE VACUUM FIELD EFFECT TRANSISTOR FABRICATION AND 3D VACUUM FIELD EFFECT TRANSISTOR ARRAYS
SEMICONDUCTOR-FREE VACUUM FIELD EFFECT TRANSISTOR FABRICATION AND 3D VACUUM FIELD EFFECT TRANSISTOR ARRAYS
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机译：无半导体真空场效应晶体管制造和3D真空场效应晶体管阵列
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摘要
A vacuum field-emission-transistor device, a drain comprised of either a metal or a semimetal material, a gate arranged adjacent to, but separated from, the drain, a source comprised of either a metal or a semimetal material adjacent to, but separated from the metal gate, and a void through the metal drain and the metal gate to expose the drain, wherein the distance between the drain and the source is shorter than a mean free path distance of electrons in air.
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