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METHOD AND SYSTEM FOR PROVIDING A MAGNETIC JUNCTION USABLE IN SPIN TRANSFER TORQUE APPLICATIONS USING A POST-PATTERN ANNEAL

机译:提供一种方法的系统和系统,该方法可用于使用后模式退火的旋转传递扭矩应用中的磁性结

摘要

A magnetic junction usable in a magnetic device and a method for providing the magnetic junction are described. A first portion of a magnetoresistive stack corresponding to the magnetic junction is provided. Providing this portion of the magnetoresistive stack includes providing at least one layer for a free layer of the magnetic junction. A second portion of the magnetoresistive stack is provided after the step of providing the first portion of the magnetoresistive stack. The magnetoresistive stack is patterned to provide the magnetic junction after the step of providing the second portion of the magnetoresistive stack. An ambient temperature for the magnetoresistive stack and the magnetic junction does not exceed a crystallization temperature of the free layer after the step of providing the free layer through the step of patterning the magnetoresistive stack. The magnetic junction is annealed at an anneal temperature not less than the crystallization temperature after the step of patterning the magnetoresistive stack.
机译:描述了可用于磁性装置中的磁性结和用于提供磁性结的方法。提供了与磁结相对应的磁阻堆栈的第一部分。提供磁阻堆栈的这一部分包括为磁结的自由层提供至少一层。在提供磁阻堆栈的第一部分的步骤之后,提供磁阻堆栈的第二部分。在提供磁阻堆栈的第二部分的步骤之后,对磁阻堆栈进行构图以提供磁结。在通过构图磁阻堆叠的步骤来提供自由层的步骤之后,磁阻堆叠和磁性结的环境温度不超过自由层的结晶温度。在构图磁阻堆叠的步骤之后,在不低于结晶温度的退火温度下对磁性结进行退火。

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