首页> 外国专利> AG ALLOY FILM FOR REFLECTING ELECTRODE OR WIRING ELECTRODE, REFLECTING ELECTRODE OR WIRING ELECTRODE, AND AG ALLOY SPUTTERING TARGET

AG ALLOY FILM FOR REFLECTING ELECTRODE OR WIRING ELECTRODE, REFLECTING ELECTRODE OR WIRING ELECTRODE, AND AG ALLOY SPUTTERING TARGET

机译:用于反射电极或接线电极,反射电极或接线电极的AG合金膜以及AG合金溅射靶

摘要

An Ag alloy film used for a reflecting electrode or an interconnection electrode, the Ag alloy film exhibiting low electrical resistivity and high reflectivity and having exceptional oxidation resistance under cleaning treatments such as an O2 plasma treatment or UV irradiation, wherein the Ag alloy film contains either In in an amount of larger than 2.0 atomic % to 2.7 atomic % or smaller; or Zn in an amount of larger than 2.0 atomic % to 3.5 atomic % or smaller; or both. The Ag alloy film may further contain Bi in an amount of 0.01 to 1.0 atomic %.
机译:一种用于反射电极或互连电极的Ag合金膜,该Ag合金膜表现出低电阻率和高反射率,并且在诸如O 2 等离子处理或UV照射的清洁处理下具有优异的抗氧化性,其中,所述Ag合金膜含有大于2.0原子%至2.7原子%以下的In。 Zn的含量大于2.0原子%至3.5原子%以下。或两者。 Ag合金膜可以进一步包含0.01至1.0原子%的Bi。

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