首页> 外国专利> Micromechanical pressure sensor device including, formed side-by-side in a micromechanical functional layer, first and second micromechanical functional regions that correspond to a pressure sensor and another sensor, and corresponding manufacturing method

Micromechanical pressure sensor device including, formed side-by-side in a micromechanical functional layer, first and second micromechanical functional regions that correspond to a pressure sensor and another sensor, and corresponding manufacturing method

机译：微机械压力传感器装置，包括在微机械功能层中并排形成的，与压力传感器和另一个传感器相对应的第一和第二微机械功能区域，以及相应的制造方法

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摘要

A micromechanical pressure sensor device and a corresponding manufacturing method. The micromechanical pressure sensor device includes an ASIC wafer, a rewiring system, formed on the front side, which includes a plurality of strip conductor levels and insulating layers situated in between, a structured insulating layer formed above an uppermost strip conductor level, a micromechanical functional layer formed on the insulating layer and which includes a diaphragm area, which may be acted on by pressure, above a recess in the insulating layer as a first pressure detection electrode, and a second pressure detection electrode on the uppermost strip conductor level, formed in the recess at a distance from the diaphragm area and is electrically insulated from the diaphragm area. The diaphragm area is electrically connected to the uppermost strip conductor level by one or multiple first contact plugs which are led through the diaphragm area and through the insulating layer.

机译：微机械压力传感器装置及其相应的制造方法。微机械压力传感器装置包括ASIC晶片，形成在前侧的重新布线系统，其包括多个带状导体层和位于其间的绝缘层，在最上层的带状导体层上方形成的结构化绝缘层，微机械功能形成在绝缘层上的层，其包括在绝缘层中的凹部上方的膜片区域，该膜片区域可以通过压力作用，作为第一压力检测电极，以及在最上面的条状导体层上的第二压力检测电极，形成在凹槽与膜片区域相距一定距离，并且与膜片区域电绝缘。隔膜区域通过一个或多个第一接触塞电连接到最上面的带状导体层，所述第一接触塞被引导穿过隔膜区域并穿过绝缘层。

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公开/公告号US10031038B2

专利类型
公开/公告日2018-07-24

原文格式PDF
申请/专利权人 ROBERT BOSCH GMBH;
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申请/专利号US201415110726
发明设计人 JOHANNES CLASSEN;
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申请日2014-11-17
分类号B81B7;B81C1;H01L21/44;H01L21/48;H01L21/50;B81B3;H01L23/48;G01L9;B81B7/02;
国家 US
入库时间 2022-08-21 13:05:08

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