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SILICA-BASED COMPOSITE FINE PARTICLE FLUID DISPERSION, PRODUCTION METHOD THEREFOR AND ABRASIVE GRAIN FLUID DISPERSION INCLUDING SILICA-BASED COMPOSITE FINE PARTICLE FLUID DISPERSION
SILICA-BASED COMPOSITE FINE PARTICLE FLUID DISPERSION, PRODUCTION METHOD THEREFOR AND ABRASIVE GRAIN FLUID DISPERSION INCLUDING SILICA-BASED COMPOSITE FINE PARTICLE FLUID DISPERSION
PROBLEM TO BE SOLVED: To provide a production method for a silica-based composite particle fluid dispersion capable of polishing even a silica film, a Si wafer or a difficult-to-work material at high speed and achieving high surface accuracy at same time.;SOLUTION: There is provided the silica-based composite fine particle fluid dispersion including silica-based composite fine particle which has an average particle diameter of 50 to 350 nm and has, on a surface of a mother particle having amorphous silica as main component, a child particle having crystalline ceria as a main component, and comprises properties of following [1] to [4]. [1] The silica-based composite fine particle has a mass ratio of silica and ceria of 100:11 to 316. [2] Only a crystal phase of ceria is detected when the silica-based composite fine particles are subjected to an X ray diffraction. [3] The silica-based composite fine particle has crystallite diameter of the crystalline ceria measured by the X ray diffraction of 10 to 25 nm. [4] A silicon atom is solid-solved in the crystalline ceria which is a main component of the child particles.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT
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