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INSPECTION CONDITION DETERMINATION DEVICE, INSPECTION CONDITION DETERMINATION METHOD AND INSPECTION CONDITION DETERMINATION PROGRAM
INSPECTION CONDITION DETERMINATION DEVICE, INSPECTION CONDITION DETERMINATION METHOD AND INSPECTION CONDITION DETERMINATION PROGRAM
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机译：检验条件确定装置，检验条件确定方法和检验条件确定程序
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摘要
PROBLEM TO BE SOLVED: To provide an inspection condition determination device, an inspection condition determination method and an inspection condition determination program with which it is possible to determine an optical condition under which various flaw patterns of an inspection object can be detected comprehensively from images.SOLUTION: An inspection condition determination device 1 comprises: an addition unit 11 for adding data that simulates an assumed flaw in an inspection object to a designated position of a three-dimensional model of the inspection object; a generation unit 12 for generating a flaw-less image in which an optical condition at the time of imaging the inspection object is reproduced in the three-dimensional model, and a flaw-including image in which the optical condition is reproduced in the three-dimensional model to which flaw-simulating data is added; a determination unit 13 for determining whether or not a difference between the flaw-less image and the flaw-including image at a designated position exceeds a threshold at which a flaw in the inspection object is detectable; and an extraction unit 14 for extracting, from among a plurality of optical conditions, an optical condition under which flaws of a plurality of designated patterns are detectable.SELECTED DRAWING: Figure 1
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