PROBLEM TO BE SOLVED: To provide a method which can replace a dresser disc without stopping a substrate polishing device and increase the operation rate of the device.;SOLUTION: A dresser holder 42 includes a protrusion which is engaged with a recess provided in a dresser disc 41. A replacement method of a dresser disc in a substrate polishing device includes: a step of moving the dresser holder 42 to a removal base 46 and detaching the dresser disc 41 from the dresser holder 42 after a substrate polishing device 3A finishes processing of a substrate group in one unit when the service life of the dresser disc elapses; and a step of moving the dresser holder 42 to the upper side of an attachment base 47 where a new dresser disc is placed, and attaching the new dresser disc to the dresser holder 42 with descending of the dresser holder.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2018,JPO&INPIT
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