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LIQUID LEVEL HEIGHT MEASURING DEVICE, LIQUID INJECTING DEVICE HAVING LIQUID LEVEL HEIGHT MEASURING DEVICE, AND METHOD FOR MEASURING LIQUID LEVEL HEIGHT USING LEVEL HEIGHT MEASURING DEVICE
LIQUID LEVEL HEIGHT MEASURING DEVICE, LIQUID INJECTING DEVICE HAVING LIQUID LEVEL HEIGHT MEASURING DEVICE, AND METHOD FOR MEASURING LIQUID LEVEL HEIGHT USING LEVEL HEIGHT MEASURING DEVICE
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机译:液位测量装置,具有液位测量装置的注液装置以及使用液位测量装置测量液位的方法
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摘要
To contactlessly measure a change of liquid level in a transparent container with high accuracy without being affected by an environment or enable a change of liquid level in a transparent container to be measured contactlessly when there is difficulty bringing a sensor into direct contact with a liquid level because of the presence of a narrow part in a measurement path.SOLUTION: A liquid level height measuring device 50 measures a liquid level height in a container 30 by a change from a reference height. A length measuring instrument with laser interferometer 100 includes a laser light source, a beam splitter and a laser detector, and is capable of radiating a laser beam. A reflector 18 reflects the laser beam radiated from the length measuring instrument with laser interferometer at the underside of the container. The length measuring instrument with laser interferometer finds a liquid level height, as a change from the reference height, from a difference between the reference optical path length Lof the laser beam radiated from the laser light source and reflected from the reflector when the liquid level height in the container is at reference height and an optical path length Lx at the time the liquid level height is changed, and the refractive index of a liquid 34 under measurement that is included in the container during measurement.SELECTED DRAWING: Figure 2
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