PROBLEM TO BE SOLVED: To provide an EPMA quantitative analysis method capable of securing analysis accuracy while operation time is short, regardless of the skill level of analyzer.;SOLUTION: An EPMA quantitative analysis method comprises: a point analysis step of performing a qualitative analysis of an analysis sample by a point analysis under a basic condition; a step of outputting a mass concentration of an analysis objected element obtained by the point analysis as a semi-quantitative value; a standard sample selection step of selecting at least three standard samples for an analytical curve according to the semi-quantitative value; a plane analysis step of performing a plane analysis of the selected standard samples and the analysis sample under a prescribed condition set according to the semi-quantitative value; an average count number outputting step of outputting an average count number of the objected element in an analytical area for each of the standard samples and the analysis sample on the basis of the result of the plane analysis; a regression equation output step of creating the analytical curve based on the average count number of the standard samples to output a regression equation; and a mass concentration calculation step of substituting the average count number of the analysis sample for the regression equation to calculate a mass concentration.;SELECTED DRAWING: None;COPYRIGHT: (C)2019,JPO&INPIT
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