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TARGETS FOR LASER HIGH-ENERGY PHYSICS

机译:激光高能物理的目标

摘要

In particular embodiments, the present disclosure provides targets including a metal layer and defining a hollow inner surface. The hollow inner surface has an internal apex. The distance between at least two opposing points of the internal apex is less than about 15 μm. In particular examples, the distance is less than about 1 μm. Particular implementations of the targets are free standing. The targets have a number of disclosed shaped, including cones, pyramids, hemispheres, and capped structures. The present disclosure also provides arrays of such targets. Also provided are methods of forming targets, such as the disclosed targets, using lithographic techniques, such as photolithographic techniques. In particular examples, a target mold is formed from a silicon wafer and then one or more sides of the mold are coated with a target material, such as one or more metals.
机译:在特定实施例中,本公开提供了包括金属层并限定中空内表面的靶。中空的内表面具有内部顶点。内部顶点的至少两个相对点之间的距离小于约15μm。在特定示例中,该距离小于大约1μm。目标的具体实现是独立的。目标具有许多公开的形状,包括圆锥体,棱锥,半球和带帽结构。本公开还提供了这种靶的阵列。还提供了使用诸如光刻技术的光刻技术形成诸如所公开的靶的靶的方法。在特定示例中,目标模具由硅晶片形成,然后模具的一个或多个侧面涂覆有目标材料,例如一种或多种金属。

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