Synthetic quartz glass substrate polishing slurry and manufacture of synthetic quartz glass substrate using the same

• 1. 合成石英玻璃基板抛光浆料和利用该抛光浆料制造合成石英玻璃基板 [P] . 中国专利： CN102516872B . 2015.12.16
• 2. 合成石英玻璃基板抛光浆料和利用该抛光浆料制造合成石英玻璃基板 [P] . 中国专利： CN102516872A . 2012-06-27
• 3. SYNTHETIC QUARTZ GLASS SUBSTRATE POLISHING SLURRY AND MANUFACTURE OF SYNTHETIC QUARTZ GLASS SUBSTRATE USING THE SAME [P] . MY167586A . 2018-09-20

  机译： 合成石英玻璃基质抛光浆液和使用相同的合成石英玻璃基质制备

• 4. Synthetic quartz glass substrate polishing slurry and manufacture of synthetic quartz glass substrate using the same [P] . 美国专利： US9963634B2 . 2018-05-08

  机译： 合成石英玻璃基板抛光浆料及使用该浆料的合成石英玻璃基板的制造

• 5. SYNTHETIC QUARTZ GLASS SUBSTRATE POLISHING SLURRY AND MANUFACTURE OF SYNTHETIC QUARTZ GLASS SUBSTRATE USING THE SAME [P] . 欧洲知识产权局专利： EP2594618B1 . 2017-08-02

  机译： 合成石英玻璃基质抛光浆液和使用相同的合成石英玻璃基质制备

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