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GAS DISTRIBUTION UNIT FOR FLUIDIZED BED REACTOR SYSTEM FLUIDIZED BED REACTOR SYSTEM HAVING THE GAS DISTRIBUTION UNIT AND METHOD FOR PREPARING GRANULAR POLYCRYSTALLINE SILICON USING THE FLUIDIZED BED REACTOR SYSTEM
GAS DISTRIBUTION UNIT FOR FLUIDIZED BED REACTOR SYSTEM FLUIDIZED BED REACTOR SYSTEM HAVING THE GAS DISTRIBUTION UNIT AND METHOD FOR PREPARING GRANULAR POLYCRYSTALLINE SILICON USING THE FLUIDIZED BED REACTOR SYSTEM
The present invention relates to a fluidized bed reactor system, and a method of manufacturing a particle-type polysilicon using the fluidized bed reactor system including a gas flow distribution system for a reactor device, the gas distribution device. A gas distribution device for a fluid bed reactor system according to the invention makes it possible to control the composition of the flow rate adjustment and the gas of the gas by area in the plenum chamber. Then, the fluidized bed reactor system with the said gas distribution device makes it possible to control the shape of the fluidized bed (in particular, switching between the fluidized bed and the ejection fluid bed). This fluidized bed process for producing a particle-type polysilicon using the reactor system is not only possible to improve the reliability and productivity of the process at the same time, makes it possible to cope with more flexible in case of abnormal situations.;
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