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thin film deposition composition containing germanium derivative the germanium-containing thin film prepared by using the same and the method of producing a germanium-containing thin film using the same
thin film deposition composition containing germanium derivative the germanium-containing thin film prepared by using the same and the method of producing a germanium-containing thin film using the same
The present invention relates to a composition comprising a germanium derivative which can be used as a precursor in the formation of various germanium-containing thin films, a germanium-containing thin film produced using the same, and a method for producing a germanium-containing thin film using the same.
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