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METHOD OF FORMING LEAD ZIRCONATE TITANATE SINTERED COMPACT LEAD ZIRCONATE TITANATE SINTERED COMPACT AND LEAD ZIRCONATE TITANATE SPUTTERING TARGET
METHOD OF FORMING LEAD ZIRCONATE TITANATE SINTERED COMPACT LEAD ZIRCONATE TITANATE SINTERED COMPACT AND LEAD ZIRCONATE TITANATE SPUTTERING TARGET
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机译：铅酸锆钛酸盐烧结体的形成方法铅酸锆钛酸盐烧结体和铅酸钛钛酸盐溅射靶的形成方法
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摘要
Disclosed is a method for producing a lead zirconate titanate-based sintered body having a uniform crystal phase and a high density of PbO.;A method for producing a lead zirconate titanate-based sintered body according to the present invention is characterized in that a preliminary sintered body obtained by sintering a raw material powder of lead zirconate titanate mixed in a stoichiometric composition at a temperature of 900 C to 1200 C is prepared, , PbO powder is added to the powder of the pulverized pre-sintered body to prepare an excess of lead mixed powder, and the excess of the lead mixed powder is sintered at a temperature lower than the sintering temperature of the pre-sintered body. By dividing the sintering process into two stages, PbZrO3, PbTiO3, ZrO2, TiO2(For example, 95% or more) of the PZT sintered body consisting only of PZT in the stoichiometric composition in which PbO and other intermediate compounds are not present and PbO 2 in the excess component are obtained.;Sintered product, titanic acid, zircon lead zirconate
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