首页> 外国专利> ABERRATION-CORRECTING METHOD LASER PROCESSING METHOD USING SAID ABERRATION-CORRECTING METHOD LASER IRRADIATION METHOD USING SAID ABERRATION-CORRECTING METHOD ABERRATION-CORRECTING DEVICE AND ABERRATION-CORRECTING PROGRAM

ABERRATION-CORRECTING METHOD LASER PROCESSING METHOD USING SAID ABERRATION-CORRECTING METHOD LASER IRRADIATION METHOD USING SAID ABERRATION-CORRECTING METHOD ABERRATION-CORRECTING DEVICE AND ABERRATION-CORRECTING PROGRAM

机译:表示像差校正方法的激光处理方法,表示像差校正方法的激光照射方法,表示像差校正设备和像差校正程序的激光校正方法

摘要

In the aberration correcting method according to the embodiment of the present invention, in the aberration correcting method of the laser irradiating apparatus 1 for condensing the laser light in the light-transmissive medium 60, the light-converging point of the laser light is generated inside the medium And the aberration of the laser light is corrected so as to be located between the aberration ranges. When the refractive index of the medium 60 is n, the depth from the incident surface of the medium 60 to the focal point of the lens 50 is d, and the aberration generated by the medium 60 is? S, And nxd or more and nxd +? S or less.
机译:在根据本发明实施例的像差校正方法中,在用于将激光会聚在透光介质60中的激光照射装置1的像差校正方法中,在内部产生激光的光会聚点。介质并且校正激光的像差以使其位于像差范围之间。当介质60的折射率为n时,从介质60的入射表面到透镜50的焦点的深度为d,并且介质60产生的像差为λ。 S,nxd或更多,nxd +? S或更少。

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