The present invention relates to an exposure apparatus to calibrate operation precision of a stage by using reference plates which are smaller than a stage operation area. The exposure apparatus has a calibration unit which prepares transfer precision calibration information of a transfer stage using reference plates. The calibration unit prepares the first calibration information using a reference plate stacked on a first measuring area of the transfer stage, and prepares the second calibration information using a reference plate stacked on at least one second measuring area having an overlapping area with the first measuring area.;COPYRIGHT KIPO 2017
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