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EBG AN ON-CHIP ELECTROMAGNETIC BANDGAP EBG STRUCTURE FOR NOISE SUPPRESSION
EBG AN ON-CHIP ELECTROMAGNETIC BANDGAP EBG STRUCTURE FOR NOISE SUPPRESSION
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机译：EBG一种用于抑制噪声的芯片上电磁带隙EBG结构
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摘要
An integrated circuit (IC) die for electromagnetic band gap (EBG) noise suppression is provided. A power mesh and a ground mesh are stacked within a back end of line (BEOL) region overlying a semiconductor substrate, and an inductor is arranged over the power and ground meshes. The inductor comprises a plurality of inductor segments stacked upon one another and connected end to end to define a length of the inductor. A capacitor underlies the power and ground meshes, and is connected in series with the inductor. Respective terminals of the capacitor and the inductor are respectively coupled to the power and ground meshes. A method for manufacturing the IC die is also provided.
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