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X- X-RAY METHOD FOR MEASUREMENT CHARACTERIZATION AND ANALYSIS OF PERIODIC STRUCTURES

机译:X-射线法测量表征和周期结构分析

摘要

Use periodic spatial pattern X-ray illumination to collect information about the periodic object. Generates the structured illumination using the interaction of the X-ray source with the coherent or partially coherent beam-splitting grating, and generates the Talbot interference pattern with the periodic structure. Then, the subject of the periodical structure to be measured is arranged in the structured illumination, and the ensemble of the signals from the multiple illumination points is analyzed to determine various characteristics of the subject and the structure thereof. X-ray absorption / transmission, incineration X-ray scattering, X-ray fluorescence, X-ray reflection, X-ray diffraction can be applied using the method of the present invention.
机译:使用周期性空间模式X射线照明来收集有关周期性对象的信息。利用X射线源与相干或部分相干分束光栅的相互作用生成结构化照明,并生成具有周期性结构的Talbot干涉图。然后,将要测量的周期性结构的对象布置在结构化照明中,并且分析来自多个照明点的信号的集合以确定对象的各种特性及其结构。 X射线吸收/透射,焚烧X射线散射,X射线荧光,X射线反射,X射线衍射可以使用本发明的方法来应用。

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