首页>
外国专利>
X- X-RAY METHOD FOR MEASUREMENT CHARACTERIZATION AND ANALYSIS OF PERIODIC STRUCTURES
X- X-RAY METHOD FOR MEASUREMENT CHARACTERIZATION AND ANALYSIS OF PERIODIC STRUCTURES
展开▼
机译:X-射线法测量表征和周期结构分析
展开▼
页面导航
摘要
著录项
相似文献
摘要
Use periodic spatial pattern X-ray illumination to collect information about the periodic object. Generates the structured illumination using the interaction of the X-ray source with the coherent or partially coherent beam-splitting grating, and generates the Talbot interference pattern with the periodic structure. Then, the subject of the periodical structure to be measured is arranged in the structured illumination, and the ensemble of the signals from the multiple illumination points is analyzed to determine various characteristics of the subject and the structure thereof. X-ray absorption / transmission, incineration X-ray scattering, X-ray fluorescence, X-ray reflection, X-ray diffraction can be applied using the method of the present invention.
展开▼