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Test mass compensation of mass measurement drift in a microcantilever resonator

机译：在微悬臂梁谐振器中测试质量测量漂移的质量补偿

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摘要

The present disclosure provides methods and mechanisms for measuring small masses attached to a substrate within a microcantilever. Specifically, the disclosure describes the measurement of small particles accumulated at a substrate that cannot be flowed through a microchannel within a microcantilever. A resonance measurement is acquired at a first time. A pair resonance measurements is then acquired at a second point in time—one with the test mass at a first position off or along the microcantilever, the second with the test mass at a second position along the microcantilever. Comparing the resonance frequencies determined for the two test mass positions allows for disambiguation of changes in the mass of the particles from changes in the resonant behavior of the microcantilever itself.

机译：本公开提供了用于测量附着在微悬臂梁内的衬底上的小质量的方法和机制。具体地，本发明描述了对不能流过微悬臂梁内的微通道的，在基底处积累的小颗粒的测量。首次获取共振测量值。然后，在第二个时间点获取一对共振测量值，一个是测试质量位于偏离微悬臂或沿着微悬臂的第一位置，第二个是测试质量处于沿微悬臂的第二位置。比较为两个测试质量位置确定的共振频率，可以使微粒质量的变化与微悬臂梁本身的共振行为的变化消除歧义。

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公开/公告号US9671350B2

专利类型
公开/公告日2017-06-06

原文格式PDF
申请/专利权人 APPLIED INVENTION LLC;
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申请/专利号US201414477287
发明设计人 W. DANIEL HILLIS;
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申请日2014-09-04
分类号G01N33/48;G01N33/50;G01N21/84;G01Q10/04;G02B6/36;G01N29/02;G01N5/02;G01N29/30;G06F19;G01N15/10;G01N15;G01N9;
国家 US
入库时间 2022-08-21 13:42:17

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