Methods for conformal treatment of dielectric films with low thermal budget

• 1. 在具有保形涂层的低热扩散率模具上的光学膜复制 [P] . 中国专利： CN102448703A . 2012-05-09
• 2. 使用保形掺杂物膜沉积在3D结构中的保形卤素掺杂 [P] . 中国专利： CN111095481A . 2020-05-01
• 3. METHODS FOR CONFORMAL TREATMENT OF DIELECTRIC FILMS WITH LOW THERMAL BUDGET [P] . 美国专利： US2017316930A1 . 2017-11-02

  机译： 低热预算介电膜的保形处理方法

• 4. METHODS FOR CONFORMAL TREATMENT OF DIELECTRIC FILMS WITH LOW THERMAL BUDGET [P] . 美国专利： US2014273539A1 . 2014-09-18

  机译： 低热预算介电膜的保形处理方法

• 5. METHOD FOR PREPARING NANOPOROUS ULTRA LOW DIELECTRIC FILM INCLUDING HIGH TEMPERATURE OZONE TREATMENT, AND NANOPOROUS ULTRA LOW DIELECTRIC FILM PREPARED THEREBY, CAPABLE OF IMPROVE THE SIZE AND DISTRIBUTION OF THE HOLE OF THE ULTRA LOW DIELECTRIC FILM [P] . 韩国专利： KR20110093669A . 2011-08-18

  机译： 包括高温臭氧处理的纳米级超低电介质膜的制备方法，以及由此制备的纳米级超低电介质膜，能够提高超低电介质膜孔的尺寸和分布

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• 2. Low Dielectric Loss and Good Dielectric Thermal Stability of xNd(Zn_(1/2)Ti_(1/2)) O_3-(1-x)Ba_(0.6)Sr_(0.4)TiO_3 Thin Films Fabricated by Sol-Gel Method [J] . Xiaohua Sun, Ying Yang, Qiaoling Zhang, Journal of the American Ceramic Society . 2013,第3期
• 3. High-Performance a-InGaZnO Thin-Film Transistors with Extremely Low Thermal Budget by Using a Hydrogen-Rich Al 2O 3 Dielectric [J] . Yan Shao, Xiaohan Wu, Mei-Na Zhang, Nanoscale Research Letters . 2019,第1期
• 4. Effects of thermal treatment and pH on electrical and physical properties of NdAlO3 dielectric thin films using sol-gel method [J] . Tseng Ching-Fang, Lin Po-An, Wei Tzu-Chun Japanese journal of applied physics . 2016,第1S期
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• 8. Polyimide/mica hybrid films with low coefficient of thermal expansion and low dielectric constant [O] . Wei Zhao, Yong Xu, Chaoran Song, 2019

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• 2. Plasma Surface Treatment of BOPP Film by Dielectric Barrier Glow Discharge in Argon/Air [J] . Longxi Chen ,Xiangjia Meng ,Zhen Mei . 现代物理（英文） . 2015,第14期
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• 4. Optimization of Spectral and Angular Selectivity in Obliquely Deposited TiO2/Ag/TiO2 Thin Films Prepared by Thermal Evaporation and Sputtering Methods [J] . Haji Faki Haji1 ,Nuru Ramadhani Mlyuka2 . 材料科学与工程：中英文B版 . 2015,第005期
• 5. 无卤低热膨胀系数低介电常数覆铜板的制备 [C] . 董晋超 ,王小兵 ,唐军旗 . 2020年第二十一届中国覆铜板技术研讨会 . 2018
• 6. BiFeO3/Bi3.25La0.75Ti3O12膜的介电弛豫行为及Ba(Zr0.15Ti0.85)O3陶瓷的介电性能研究 [A] . 朱卫利 . 2011