首页> 外国专利> MECHANICAL DESIGN OF THIN-FILM DIAMOND CRYSTAL MOUNTING APPARATUS WITH OPTIMIZED THERMAL CONTACT AND CRYSTAL STRAIN FOR COHERENCE PRESERVATION X-RAY OPTICS

MECHANICAL DESIGN OF THIN-FILM DIAMOND CRYSTAL MOUNTING APPARATUS WITH OPTIMIZED THERMAL CONTACT AND CRYSTAL STRAIN FOR COHERENCE PRESERVATION X-RAY OPTICS

机译:具有优化的热接触和晶体应变的薄膜金刚石晶体安装装置的机械设计,用于保持相干性X射线光学元件

摘要

A method and mechanical design for a thin-film diamond crystal mounting apparatus for coherence preservation x-ray optics with optimized thermal contact and minimized crystal strain are provided. The novel thin-film diamond crystal mounting apparatus mounts a thin-film diamond crystal supported by a thick chemical vapor deposition (CVD) diamond film spacer with a thickness slightly thicker than the thin-film diamond crystal, and two groups of thin film thermal conductors, such as thin CVD diamond film thermal conductor groups separated by the thick CVD diamond spacer. The two groups of thin CVD film thermal conductors provide thermal conducting interface media with the thin-film diamond crystal. A piezoelectric actuator is integrated into a flexural clamping mechanism generating clamping force from zero to an optimal level.
机译:提供了一种用于薄膜金刚石晶体安装设备的方法和机械设计,该薄膜金刚石晶体安装设备用于具有最佳的热接触和最小的晶体应变的相干保存X射线光学器件。该新颖的薄膜金刚石晶体安装装置安装由厚度比薄膜金刚石晶体稍厚的厚化学气相沉积(CVD)金刚石膜隔离物支撑的薄膜金刚石晶体和两组薄膜热导体。例如,由较厚的CVD金刚石垫片隔开的薄CVD金刚石膜热导体组。两组薄的CVD薄膜热导体提供了与薄膜金刚石晶体的导热界面介质。压电致动器被集成到挠曲夹紧机构中,产生从零到最佳水平的夹紧力。

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