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METHOD FOR LASER DEPOSITION OF ORGANIC MATERIAL FILM OR ORGANIC-INORGANIC COMPOSITE MATERIAL FILM AND LASER DEPOSITION APPARATUS
METHOD FOR LASER DEPOSITION OF ORGANIC MATERIAL FILM OR ORGANIC-INORGANIC COMPOSITE MATERIAL FILM AND LASER DEPOSITION APPARATUS
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机译：激光沉积有机材料膜或有机-无机复合材料膜的方法及激光沉积装置
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摘要
A method of laser-depositing at least one type of organic material, characterized in that a duty ratio of a laser that evaporates the organic material is adjusted, which addresses the problem of providing an organic material deposition method and deposition apparatus that solve the issues in the conventional art, such as the organic material vaporizing and contaminating the other raw materials to be deposited, and the film formation rate running out of control, and whereby the film formation rate and the evaporation rate can be stably adjusted and controlled. Additionally, the invention is characterized in that the duty ratio is adjusted based on the evaporation rate of the organic substance or the vapor pressure inside the vacuum chamber used for deposition.
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