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Vibration characteristic measurement method and vibration characteristic measurement program of a cantilever
Vibration characteristic measurement method and vibration characteristic measurement program of a cantilever
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机译：悬臂梁的振动特性测量方法和振动特性测量程序
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摘要
A method for measuring vibration characteristic of a cantilever is proposed in this disclosure. The method includes: measuring vibration amplitude V of a cantilever installed in a scanning probe microscope when vibration with a resonant frequency f1 (Hz) is applied to the cantilever; obtaining a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0; and calculating a Q value by using the following Expression (1):
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