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Tunable MEMS Fabry-Perot filter

机译:可调谐MEMS Fabry-Perot滤波器

摘要

A tunable gain medium with microelectromechanical system (MEMS) based Fabry-Perot (FP) filter cavity tuning is provided as a tunable laser. The system includes a laser cavity for wavelength selection and a filter cavity. The laser cavity is composed of a gain medium such as a semiconductor optical amplifier (SOA), two collimating lenses, and an end reflector. The MEMS-FP filter cavity includes a fixed reflector and a movable reflector that can be controlled by electrostatic force. By moving the MEMS reflector, the wavelength can be adjusted by changing the FP filter cavity length. The MEMS-FP filter cavity displacement can be adjusted discretely by the step voltage or continuously by the continuous drive voltage. The drive frequency for continuous adjustment may be the resonant frequency of the MEMS structure or any other frequency, and the wavelength tunable range may span different wavelength tunable ranges such as 30 nm, 40 nm, and more than 100 nm.
机译:提供具有基于微机电系统(MEMS)的Fabry-Perot(FP)滤波器腔调谐的可调增益介质作为可调激光器。该系统包括用于波长选择的激光腔和滤光器腔。激光腔由诸如半导体光放大器(SOA)之类的增益介质,两个准直透镜和一个端反射器组成。 MEMS-FP过滤器腔包含一个固定反射器和一个可通过静电力控制的可移动反射器。通过移动MEMS反射器,可以通过更改FP滤镜腔的长度来调节波长。 MEMS-FP滤波器腔的位移可以通过阶跃电压离散地调整,也可以通过连续驱动电压连续地调整。用于连续调节的驱动频率可以是MEMS结构的谐振频率或任何其他频率,并且波长可调范围可以跨越不同的波长可调范围,诸如30nm,40nm以及大于100nm。

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