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Precise measurement target and precise measurement method

机译:精确的测量目标和精确的测量方法

摘要

PROBLEM TO BE SOLVED: To provide a target for precise measurement capable of being used as a reference mark or a survey point for performing precise measurement, and provide a precise measurement method.SOLUTION: A target 1 for precise measurement is used for performing measurement in sub-millimeter for arranging a device at a position previously determined at a precision to sub-millimeter, and includes a square sheet 2. A circular mark 3 having a diameter of 0.1 millimeter or more and less than 0.5 millimeter, and a plurality of groups of two parallel lines 11a and 11b, two parallel lines 12a and 12b, two parallel lines 13a and 13b, and two parallel lines 14a and 14b that are arranged so that the intervals gradually become narrow toward the mark 3 are disposed on one surface of the sheet 2.
机译:解决的问题:提供一种能够用作精确测量的参考点或测量点的精确测量目标,并提供一种精确测量方法。解决方案:使用精确测量目标1进行测量。亚毫米级,用于将设备放置在预先确定的精度至亚毫米级的位置,并包括正方形薄片2。直径为0.1毫米或更大且小于0.5毫米的圆形标记3,以及多个组两个平行线11a和11b中的两个平行线12a和12b,两个平行线13a和13b以及两个平行线14a和14b被布置为使得间隔朝向标记3逐渐变窄。工作表2。

著录项

  • 公开/公告号JP6198644B2

    专利类型

  • 公开/公告日2017-09-20

    原文格式PDF

  • 申请/专利权人 株式会社パスコ;

    申请/专利号JP20140047891

  • 发明设计人 三島 研二;阿部 直宏;

    申请日2014-03-11

  • 分类号G01C15/06;

  • 国家 JP

  • 入库时间 2022-08-21 13:57:05

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