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ULTRASONIC INSPECTION DEVICE, ULTRASONIC INSPECTION SYSTEM AND ULTRASONIC INSPECTION METHOD
ULTRASONIC INSPECTION DEVICE, ULTRASONIC INSPECTION SYSTEM AND ULTRASONIC INSPECTION METHOD
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机译：超声波检查装置，超声波检查系统及超声波检查方法
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摘要
PROBLEM TO BE SOLVED: To minimize contact of a workpiece with water even if the workpiece has to stay away from the water, and what is more, to allow an ultrasonic inspection to obtain excellent images.SOLUTION: An ultrasonic inspection device comprises: an ultrasonic probe 21 that irradiates a workpiece w with ultrasonic wave to receive a reflection wave of the ultrasonic wave; an X-axis drive device 25 and Y-axis drive device 26 that cause the ultrasonic probe 21 to be operated so as to scan in a horizontal direction with respect to the workpiece w; a Z-axis drive device 27 that causes the ultrasonic probe 21 to ascend and descend with respect to the workpiece w; a water supply unit 22 that is provided in the ultrasonic probe 21, and supplies water a limited to a prescribed amount to between a probe tip end portion 211 of the ultrasonic probe 21 and the workpiece w; and a water absorption unit 23 that is provided in the ultrasonic probe 21, and absorbs the post-supplied water a in the water supply unit 22.SELECTED DRAWING: Figure 1
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