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THERMAL SHRINKAGE MEASUREMENT METHOD OF GLASS SUBSTRATE AND THERMAL SHRINKAGE MEASUREMENT DEVICE, AND MANUFACTURING METHOD OF GLASS SUBSTRATE
THERMAL SHRINKAGE MEASUREMENT METHOD OF GLASS SUBSTRATE AND THERMAL SHRINKAGE MEASUREMENT DEVICE, AND MANUFACTURING METHOD OF GLASS SUBSTRATE
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机译：玻璃基质的热收缩测量方法和热收缩测量装置，以及玻璃基质的制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a highly accurate thermal shrinkage measurement method by suppressing a measurement fluctuation of the thermal shrinkage for measuring the thermal shrinkage of a glass substrate having a high dimension accuracy.;SOLUTION: A thermal shrinkage measurement method includes: a step of cutting out the predetermined number of measurement substrates from a glass substrate; a step of attaching Vickers indentations (indentation A and indentation B) on the principal surface of a measurement substrate; and a length measurement step of measuring a distance X between a measurement point A and a measurement point B specified by each of the indentation A and the indentation B by a prior heat treatment (distance X0) and an after treatment (distance X1). In the Vickers indentation application step, each of the measurement substrate is inputted with the Vickers indentation in which the indentation distance of the indentations A-B is the same with each other. In a length measurement step, the indentations A and B are enlarged so as to acquire a cruciform image, and a cruciform contour is determined based on the image process. Measurement points (measurement points A and B) are specified in the cruciform contour, and after going through the prior thermal process and the after thermal process, the coordinate positions (x and y) of the measurement points A and B are calculated so as to measure the distance X0 and the distance X1, thereby acquiring the thermal shrinkage of the glass substrate.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2018,JPO&INPIT
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