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METHOD FOR PREPARING SAMPLE FOR MICROSTRUCTURAL DIAGNOSIS AND SAMPLE FOR MICROSTRUCTURAL DIAGNOSIS
METHOD FOR PREPARING SAMPLE FOR MICROSTRUCTURAL DIAGNOSIS AND SAMPLE FOR MICROSTRUCTURAL DIAGNOSIS
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机译:微结构诊断样品的制备方法及微结构诊断样品
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摘要
PROBLEM TO BE SOLVED: To effectively prepare a sample for a microstructural diagnosis.SOLUTION: In this method for preparing a sample for microstructural diagnosis: a sample part (PA) is prepared on a sample body through processing for removing materials; an investigation area containing a target area (ZB) to be investigated is formed in the sample part; a terrace formation zone (TBZ) containing the target area is formed on at least one surface of the sample part while at least one notch (K) that has lateral faces (F1, F2) extending obliquely to the surface is formed next to the target area through beam processing for removing materials for the purpose of forming the terrace formation zone; and materials in the sample part are removed by an ion beam (IB) within the terrace formation zone, the ion beam being made incident at a minute angle obliquely to the extension direction of the notch (K) toward the surface, with the target area located behind the notch in the incidence direction of the ion beam.SELECTED DRAWING: Figure 2A
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