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METHOD FOR PREPARING SAMPLE FOR MICROSTRUCTURAL DIAGNOSIS AND SAMPLE FOR MICROSTRUCTURAL DIAGNOSIS

机译:微结构诊断样品的制备方法及微结构诊断样品

摘要

PROBLEM TO BE SOLVED: To effectively prepare a sample for a microstructural diagnosis.SOLUTION: In this method for preparing a sample for microstructural diagnosis: a sample part (PA) is prepared on a sample body through processing for removing materials; an investigation area containing a target area (ZB) to be investigated is formed in the sample part; a terrace formation zone (TBZ) containing the target area is formed on at least one surface of the sample part while at least one notch (K) that has lateral faces (F1, F2) extending obliquely to the surface is formed next to the target area through beam processing for removing materials for the purpose of forming the terrace formation zone; and materials in the sample part are removed by an ion beam (IB) within the terrace formation zone, the ion beam being made incident at a minute angle obliquely to the extension direction of the notch (K) toward the surface, with the target area located behind the notch in the incidence direction of the ion beam.SELECTED DRAWING: Figure 2A
机译:解决的问题:有效地准备用于微结构诊断的样品。解决方案:在这种用于微结构诊断的样品制备方法中:通过去除材料的处理,在样品体上制备样品部件(PA)。在样本部分中形成包含待调查目标区域(ZB)的调查区域;在样品部分的至少一个表面上形成包含目标区域的平台形成区(TBZ),而在目标附近形成至少一个具有倾斜地延伸到侧面的侧面(F1,F2)的凹口(K)通过射束处理去除材料的区域,以形成平台形成区;并且,在台阶形成区域内通过离子束(IB)去除样品部分中的材料,使离子束以相对于切口(K)的延伸方向朝向表面倾斜的微小角度入射到目标区域。位于离子束入射方向凹口后面的部分图2A

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