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HYDROGEN PERMEABLE DIFFUSION PATH OBSERVATION APPARATUS AND METHOD OF MEASURING HYDROGEN IONS PERMEATING SAMPLE USING THE SAME
HYDROGEN PERMEABLE DIFFUSION PATH OBSERVATION APPARATUS AND METHOD OF MEASURING HYDROGEN IONS PERMEATING SAMPLE USING THE SAME
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机译：氢可渗透扩散路径观察装置和使用该方法测量氢离子渗透样品的方法
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摘要
PROBLEM TO BE SOLVED: To provide a method of measuring hydrogen ions permeating a sample.;SOLUTION: A hydrogen permeable diffusion path observation apparatus 10 comprises: a scanning electron microscope 15 having an electron source 16 for irradiating a sample 17 with an electron beam and a secondary electron detector 18 for detecting secondary electrons generated by the irradiated electron beam; a hydrogen ion detection unit 20 for detecting hydrogen ions generated by the irradiated electron beam; a hydrogen gas supply unit 19 for supplying hydrogen to a hydrogen pipe 14 connected to the back side of the sample; and a control unit 50. The sample is arranged so as to be a diaphragm between an analysis chamber and the hydrogen pipe. The hydrogen ion detection unit comprises: a collection mechanism 21 for collecting hydrogen ions generated from surfaces of the sample; an ion energy decomposition unit 22 for removing other than hydrogen ions; and an ion detector 23 for detecting the permeating hydrogen ions. The control unit acquires a SEM image rendered by secondary electrons generated from the sample, and acquires hydrogen ions in synchronization with electron beam scanning by applying electron impact desorption to the hydrogen which diffuses through the interior of the sample from the back side and discharges to the surface.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT
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