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ANALYSIS SAMPLE PREPARATION METHOD OF AUGER ELECTRON SPECTROSCOPIC ANALYSIS AND AUGER ELECTRON SPECTROSCOPIC ANALYSIS METHOD
ANALYSIS SAMPLE PREPARATION METHOD OF AUGER ELECTRON SPECTROSCOPIC ANALYSIS AND AUGER ELECTRON SPECTROSCOPIC ANALYSIS METHOD
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机译：俄歇电子光谱分析的分析样品制备方法和俄歇电子光谱分析方法
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摘要
PROBLEM TO BE SOLVED: To provide an analysis sample preparation method capable of alternately laminating a conductive body sheet and a mixture containing powder samples having different compositions to simply and effectively suppress a charge phenomenon and efficiently enable Auger electron spectroscopic analysis.SOLUTION: An analysis sample preparation method includes: a mixture preparation step S1 of mixing powder samples having difference compositions with resin respectively, to obtain a mixture for each powder sample having a different composition; a lamination step S2 of, after applying any one of the plurality of mixture on one conductive body sheet, repeatedly mounting the other conductive body sheets on the applied mixture, alternately laminating the conductive body sheets and the mixtures, and making a lower most layer and an uppermost layer into the conductive body sheet to obtain a laminate; and a cross section machining step S3 of forming a cross section to the lamination direction of the laminate.SELECTED DRAWING: Figure 1
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